Oops! Help with wet silkworm eggs.

I was checking on some silkworm eggs I was incubating and accidentally spilled some water on them. They were glued to a paper towel, so I took another paper towel and soaked up as much water as I could. The towel dried up in about 1-2 hour.

They've been incubating for about 7 days, so I'm expecting them to be hatching soon. How badly did I mess everything up?
 
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