Do your chameleons like being misted? When every water touches mine he tends to run(well not really run, but move faster) out of the path of the water.
Certainly a spray to the face is not what anyone likes. My cham likes it when I mist/spray him with slightly warmed water from behind. He runs from cold water mists. (As would I)
Some chams just like getting misted on their own terms instead of randomly shot when the keeper is ready. When my misting system goes on, it takes a minute or two, but he slowly eases into that area to get wet.
You don't want to mist them directly. You want to mist up (careful of the lighting) and let it gently fall on him. The warm water is also a really good idea.